PDMS THROUGH-HOLE FABRICATION BY SOFT LITHOGRAPHY USING CH4/HE ATMOSPHERIC RF PLASMA SURFACE TREATMENT
MEMS 2011, 304-307. 2011
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PDMS THROUGH-HOLE FABRICATION BY SOFT LITHOGRAPHY USING CH4/HE ATMOSPHERIC RF PLASMA SURFACE TREATMENT
MEMS 2011, 304-307. 2011